Semiconductor Fabrication & Manufacturing
Emerson’s semiconductor manufacturing equipment & fabrication technology ensure high purity in the semiconductor fabrication process.
In critical semiconductor fabrication applications, the last thing you need is downtime. We understand the need to reduce contaminants and provide a reliable process to achieve optimal yield rates. At semiconductor fabrication plants and foundries across the world, Emerson’s semiconductor manufacturing equipment, fabrication technology and gas delivery system regulators are trusted to deliver superior performance. You can count on Emerson’s global network to provide localized support for your semiconductor fabrication process.
Semiconductor fabricators depend on robust bulk specialty gas systems (BSGS) that can maximize throughput and production time through continuous delivery of specialty gases, at high volume and flow rates. Emerson’s regulators are designed to facilitate high-volume transmission from start to finish. Our products enable uptime and help provide a reliable, primary point of contact, while ensuring the transmission of high-volume throughput across your applications.
End users depend on precise pressure control at gas distribution points that connect to manufacturing tools and applications. Emerson’s regulators provide superior pressure control between valve manifold boxes and process tools. Our technological designs help create a reliable, final point of contact that ensures quality, purity, and repeatability of the process, and help increase yields by reducing the number of products rendered defective by media contamination.
Gas cabinet systems depend on precise control of often hazardous media to safely and efficiently store them for use within semiconductor manufacturing systems. Emerson’s TESCOM regulators help ensure the integrity of this integral point in the gas distribution chain. By improving the operating interface and controls, our technology allows end users to streamline maintenance, reduce downtime and manage increased production schedules.
Emerson’s TESCOM gas pressure regulators are optimized regulators to ensure a reliable, safe semiconductor gas delivery system across your fabrication facilities. Easy to use and install and versatile, with modular features ideal for changing or expanding production targets, these products support customized solutions and adapt to high-integrity standard applications. Our trusted, global network can provide localized support for highly specific application challenges.
The semiconductor manufacturing process depends on controlling airborne molecular contaminants (AMC) on production tools and semiconductor wafers, which is made more challenging by reduced wafer geometric footprints. Emerson’s solenoid technology delivers responsive, precise flow control and enables superior performance and reliability in nitrogen purging stations, which helps reduce maintenance and downtime while increasing throughput.
The challenge of high throughput and reliability standards have made semiconductor manufacturing dependent on system intelligence and communication. Emerson’s precision controls of temperature, flow, pressure and position are supported by sophisticated IIoT capabilities that touch all elements of the handling system. Our solutions provide consistent communication to the valve and enable integration of the web server in the most demanding semiconductor manufacturing applications.
Learn about Emerson's capabilities with our TESCOM branded products such as our 64 series regulators along with semiconductors. TESCOM high purity regulators used for applications that require high cleanliness levels, low leakage rates, and accurate pressure control.
Emerson's pressure control solutions ensure high purity of the process with minimal media contamination, resulting in optimized fabrication yield rates. As a global supplier, we offer you quick and local support to meet the increased demand.
Frequently Asked Questions about Semiconductor Fabrication and Manufacturing
Emerson’s solutions ensure high purity of the process with minimal media contamination. Our products proven to be reliable in harsh conditions and are ideal for a stringent clean room environment. Engineered for dependable and efficient operation under the challenging conditions of semiconductor manufacturing, our products and solutions provide high performance and a high degree of dependability, resulting in a reliable chip making process.
Critically, Emerson products deliver superior operation in the presence of specialty gases, while helps to reduce maintenance and downtime and proactively prevent or remediate production issues.
Digital transformation of semiconductor wafer fabrication can deliver transparency, precision, and accuracy in every step of the manufacturing process, and harvest data that can improve plant efficiency and productivity.
Data is the key factor in digitization. As one example, pressure changes are difficult to perceive without real-time and historical data and may not manifest as a problem until there are negative impacts on wafer quality or productivity levels. Digital transformations allow operators to detect minute pressure deviations and proactively address leakages or other problems before there is any impact on production or quality.
Semiconductor manufacturing is the industrial process used to create computer chips for today’s electronic devices such cellphones, computers, TV’s, refrigerators, and automobiles.
Many corrosive, flammable gases and chemicals such as hydrogen sulfide, hydrogen bromide and tungsten hexafluoride are essential to semiconductor manufacturing. They also can cause serious injuries to operators or physical damage to machines that handle them.
Preventative maintenance depends on developing a comprehensive story about machine health. By accessing data in real time, you can make informed, preemptive decisions about your manufacturing systems and service assets before problems emerge, and result in lower productivity, damages, or wasteful energy usage. Maintenance can be restricted to planned service periods, and the plant can avoid problems caused by leaks, corrosion, or other degradations that can occur incrementally.
Wafer fabrication is an energy-intense process. Around 46 liters of ultrapure water are required to manufacture one square inch of a microchip. The power utilization footprint of one square inch of microchip is around 7.5 kWh.
In addition to water and power, tremendous amounts of corrosive gases are used in the process. The demand for power and water is so high for semiconductor fabrication that a seasonal drought can jeopardize factory output. Semiconductor plant factories typically consume water equivalent to a mid-sized city’s usage per day.
As a result, sustainability initiatives for semiconductor manufacturers are not just about reducing costs: They also help ensure operational continuity. It is critically important to implement systems that can help you monitor every aspect of energy and water consumption, detect leakages, and keep equipment proactively maintained.
Our fluid control and pneumatic products are designed to deliver superior performance, even in the presence of specialty gases that are essential to wafer and chip fabrication. Equipped with IIoT sensors and connectivity, they help you monitor temperature, flow, pressure, and position control with greater precision and energy efficiency than is possible with analog systems.
Our proportional control, general purpose, and cryogenic valves, pressure control solutions, and pneumatic controllers can provide you with highly calibrated process control that is essential to attaining the highest reliability standards in semiconductors. Additionally, our unparalleled global network can help you maintain the most demanding schedules with minimal downtime and production disruption.