Flow Measurement of Pure Compressed Gas
Non-intrusive flow measurement of pure air, nitrogen, argon and helium
Monitoring of Expensive Pure Gases in Semiconductor Manufacturing
In semiconductor manufacturing, high pure compressed gases such as nitrogen (HP N2), argon (HP Ar), helium (HP He), and clean dry air (CDA) play crucial roles in various processes. Nitrogen is commonly used for purging and inerting to prevent oxidation and contamination. Argon is essential in plasma etching and sputtering due to its inert properties, ensuring precise material removal and deposition. Helium, with its superior thermal conductivity, is vital in cooling systems and leak detection. Pure air, free of contaminants, is used in cleanroom environments to maintain stringent quality standards.
Flow measurement of these expensive gases is critical to ensure consistent cost control, process control, efficiency, and safety. Precise flow monitoring allows for accurate gas delivery, minimizing waste and ensuring optimal performance in fabrication processes.
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Product Solutions
The Flexim FLUXUS G721 CA compressed air flow meter is a non-intrusive clamp-on ultrasonic technology, unique in that it can be applied to measure compressed air flow rates even at very low pressures (down to 3bar on steel lines and atmospheric pressure on plastic lines). Also, even the lowest flow rates are accurately captures revealing the slightest flow rates from the smallest leaks where there should be none. The FLUXUS G721 CA is particularly suitable for non-intrusively Measuring Quantities drawn off at individual points in the compressed air grid as well as detecting leaks within it.
- Non-intrusive compressed air and technical gas flow measurement from 3 bar absolute onwards.
- Available as a dual channel meter, stainless steel housing, ATEX/IECEx and FM approval.
- Integrated standard volume flow calculation.
The Flexim FLUXUS G601 CA Energy is the ideal tool for carrying out complete energy efficiency tasks in the industry as well as within facility management (according to DIN ISO 50001 standards) by allowing the measurement of compressed air flow rates as well as the monitoring of thermal energy quantities and the flow rate determination of any kind of liquid or gaseous media with just one, portable device. Engineered to survey whole compressed air infrastructures, balancing the facilities, measuring on nearly every individual leg, determining the efficiency of compressors and last, but not least, quantify and localize leaks. It measures with an inner diameter of DN6 up to DN2100 pressurized from 3 bar and upwards.
- Portable and non-intrusive flow and thermal energy metering of liquids, compressed air and technical gases.
- Bi-directional and highly dynamic on compressed air.
- Compressed air and gas measurement possible from 3 bar absolute upwards.
The Flexim FLUXUS G532 Compressed Air Ultrasonic Flow Meter is specially designed for quantity measurement of compressed air and technical gases. A compact compressed air meter with integrated standard volume flow calculation, which can also process online measurement data from temperature and pressure sensors. The proven transit time difference method offers great advantages, especially for compressed air and technical gases, such as: Flow velocities as low as 0.03 ft/s are detected, the measurement is always bi-directional and is not influenced by moisture, oil or dirt particles. FLUXUS G532 CA has a USB and LAN interface and operates the common communication interfaces Modbus TCP, Modbus RTU, BACnet MS/TP, BACnet IP and M-Bus.
- Non-intrusive compressed air and technical gas flow measurement from 3 bar absolute onwards.
- Integrated standard volume flow calculation.
- Extreme measurement dynamics from lowest to highest flow velocities - easy detection of leakages and load peaks.
The Flexim FLUXUS G731 CA compressed air flow meter boasts non-intrusive clamp-on ultrasonic technology - unique in that it can be applied to measure compressed air flow rates even at very low pressures (down to 3 bar on steel lines and atmospheric pressure on plastic lines). Also, even the lowest flow rates are accurately captured, revealing the smallest leaks. The FLUXUS G731 CA is particularly suitable for non-intrusively measuring quantities drawn off at individual points in the compressed air grid, as well as detecting leaks within it.
- Non-intrusive compressed air and technical gas flow measurement from 3 bar absolute onwards.
- Available as a dual channel meter, stainless steel housing, ATEX/IECEx and FM approval.
- Integrated standard volume flow calculation.
